United States

We present 3D printed Hybrid metasurfaces that employ variable height (3D) phase plates, pillars, and holes that provide additional degrees of freedom beyond purely planar designs. These structures were 3D printed with two-photon lithography technique.

EIPBN 2021

Hybrid Metasurface Fabrication Using Two-photon Lithography

color filters

hybrid metasurfaces

imaging

photonics

**BQIT is a three day annual workshop** aimed at enabling leading UK and international academics and industrial partners to come together; to explore and discuss future ambitions and challenges in the field of **Quantum Information Technologies.** Since our conception in 2014 we have had 230 speakers and panellists who have presented their work and opinions on a range of topics, from quantum theory to innovation in industry.


### Welcome Message
The BQIT:21 team welcomes you to the eighth Bristol Quantum Information Technologies workshop! 

Last year was the first time in our workshop's history that we had gone fully virtual. The global circumstances that continue to impact us all professionally and personally have forced BQIT once again to be delivered as an all-virtual workshop for 2021. The access this creates to colleagues across the world who would otherwise be unable to join us, as well as being able to make the workshop free for all attendees due to the lower costs involved in delivering an online workshop, are just a couple of the extraordinary benefits of meeting online. This also means that we can welcome three times as many attendees to BQIT than previous years.   

We take this opportunity to thank each of our speakers and poster presenters for contributing their technical content, this year's sponsors, whose support this year enabled BQIT:21 to be free to all attendees, and to all of our attendees for joining us online this year. We recognise the extra energy required to stay connected and motivated during these difficult times, and are hugely encouraged to see so many of you willing to continue to connect with us on an online platform. 

It is our hope that you have a productive and enjoyable time while you engage and interact with BQIT:21, and to everyone that has helped take BQIT:21 online, thank you! 

**The BQIT board and organisation team **


![](https://assets.underline.io/uploads/markdown_image/1/image/a12e0c1ad3410144cb48557690e4ecaf.png)
### This year's workshop agenda is available here: [Virtual BQIT:21](https://drive.google.com/file/d/1QwsSM0ztnxC_lgUKf3TbO3GvnI44AQkY/view?usp=sharing)
For further information, please contact us at: **bqit-admin@bristol.ac.uk**

![](https://assets.underline.io/uploads/markdown_image/1/image/a12e0c1ad3410144cb48557690e4ecaf.png)

Bristol Quantum Information Technologies Workshop

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

To register for this event, please follow the link below.

We demonstrate for the first time that anisotropic hydrofluoric acid etch behavior beneath certain metal pads (Ti, Au, Pt, Cr) can be controlled to create ultra-sharp 3D silica pyramids due to an interface effect.

Fabrication of silica pyramids by enhanced lateral etching of hydrofluoric acid below metal films

Organic soft materials, such as gels are materials of choice for a vast number of biomedical applications such as tissue engineering, soft robotics, biosensing, drug delivery, implantable electronics, etc. Here we report on in-liquid direct write technique for 3D-sculpturing of hydrogels using focused electron and X-ray beams.

Electron and X-ray Beam Direct Write Lithography in Liquids: a Step Toward 3D Nanoprinting of Soft Materials

High aspect ratio nanostructuring requires high precision pattern transfer with highly directional etching. In this work, we demonstrate the fabrication of structures with unprecedented ultra-high aspect ratios up to 10’000:1 in the nanoscale regime (down to 10 nm) by metal assisted chemical etching (MacEtch) of silicon in gas phase.

Nanofabrication by Metal Assisted Chemical Etching of Silicon in Gas Phase

In this paper we report a series of breakthroughs that led to replication of gratings with a slant angle up to 60° and an aspect ratio of 10:1 in a material with refractive index of 1.90 (RI). A study of the replication process and materials optimization will be presented.

Nanoimprint process to mass manufacture highly-angled high-RI gratings for augmented reality combiners

Sequential vapor infiltration (SVI) with trimethylaluminum into UV-cured films visualized the presence of internal layered structures with different Al distributions dependent on chemical structure of monomers. X-ray reflectivity measurements revealed that the mixing of monomers was a positive way to homogenize the Al distributions in UV-cured films.

Internal Layered Structures of UV-Cured Thin Films after Sequential Vapor Infiltration Analyzed by X-ray Reflectivity Measurements

Until now, no in-situ, non-destructive and accurate technology has been invented, which introduces huge difficulties into the superhydrophobic surfaces research and applications. We developed an optical technology to characterize the state of superhydrophobic surface.

Optical Metrology of Characterizing Superhydrophobic States on Patterned Substrates

In direct writing laser lithography, hybrid structures such as gratings on top of resist structures can be generated by combining thermal NIL with DWL lithography. At 120 °C, it is still possible to pattern the resist into at least 4 µm depth without degrading the photosensitive component.

Hybrid structures achieved by direct writing laser lithography - tuning the contrast and surface topography of grayscale photoresist with nanoimprint lithography

Colors produced from nanostructures of different geometries and materials in 2D and 3D made mostly using 3D printing with two-photon polymerization.

Nanostructured Colors from Colorless Materials

We investigated the combination of maskless UV lithography and 2PP (two-photon polymerization) on a standard photo-resist: SU-8. 2PP technology is known to be slow. The advantage of mixing the technologies becomes obvious when some elements of a design can be exposed faster using maskless UV lithography.

Hybrid 2D & 3D Lithography

In this work, we discuss the fabrication process for two types of low-index metalenses composed of air-spaced elements.  First, we discuss the fabrication of our recently demonstrated two element hybrid achromatic metalens (HAML)  that employs nanopillars. Second, we discuss a novel air-spaced, varifocal, metalens that employs nanoholes.

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Hybrid Metasurface Fabrication Using Two-photon Lithography

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