United States

High aspect ratio nanostructuring requires high precision pattern transfer with highly directional etching. In this work, we demonstrate the fabrication of structures with unprecedented ultra-high aspect ratios up to 10’000:1 in the nanoscale regime (down to 10 nm) by metal assisted chemical etching (MacEtch) of silicon in gas phase.

EIPBN 2021

Nanofabrication by Metal Assisted Chemical Etching of Silicon in Gas Phase

x-ray optics

silicon etching

nanostructures

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CAP Virtual Congress 2021

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

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We describe two accessible and successful microfluidic strategies to expose human pluripotent stem cells to spatial gradients of differentiation-inducing extracellular signals in vitro. In addition, coupling with a fluorescent reporter and live-cell imaging allowed us to characterize the spatiotemporal dynamics of differentiation of our spatially patterned cell colonies.

Spatially controlled stem cell differentiation via morphogen gradients: comparing static and dynamic microfluidic platforms

In this study, we have employed lithography techniques to fabricate stretchable metallic micro-wiring with potential applications in flexible and stretchable electronics. The metal is deposited directly on top of the nano-fiber mesh, and it is patterned with photolithographic techniques to demonstrate stretchable micro-wiring.

Lithographically patterned flexible metallic micro wiring on an electrospun nano-fiber mesh

We demonstrate a novel fabrication process for creating ultra-thin (5+ nm) suspended membranes from a variety of ALD materials. ALD films as thin as 5 nm have been released without damage using a low-power O2 plasma. This flexible process is currently being validated through fabrication of conductive TiN TEM windows.

Fabrication of Ultra-Thin Suspended ALD Membranes

Hydrogen Depassivation Lithography has been used to place donors with atomic precision in buried Si (100) planes to make quantum and atomic electronic devices. Recent demonstrations using acceptors to pair with donors enable bipolar junction transistors. These 2D-nanodevices should be extremely high-performance, low-noise, rad-hard, and capable of cryogenic operation.

Progress Toward 2D Nano Bipolar Junction Transistors

We demonstrate the co-deposition of B and P in aligned atomic-scale patterns, in order to make bipolar junction devices. This requires the use of BCl3 and PH3 as acceptor and donor dopant precursors, and dI/dV imaging to relocate the B electrode and align the P electrodes to it.

 Co-deposition of B and P for Ultraprecise Bipolar devices

Wafer-scale fabrication was used to create STEM-compatible operando graphene devices that can be characterized during operation. The e-beam can be used to further alter the device design. We employ use of secondary electron e-beam induced current (SEEBIC) imaging to visualize device conductivity and examine device failure modes in extreme conditions.

Toward atomic-scale e-beam fabrication: imaging and altering graphene-based devices

Nano fabrication technologies are subject of research in several fields. The development and commercialization of nano-inside products are still waiting for its break through. However, this paper will describe three examples of research workin fields of bioinspired computing, nano patterned surfaces for flexible substrates, and nano optics for spectroscopic measurement.

 How to implement “nano” in everyday life? Nano fabrication technologies in application oriented research and development

This work is about using near-field phase lithography and ALD process repeatedly to create non-uniform nanolattices with spatially varying geometry and material composition. The proposed approach is also employed to make an antireflection GRIN surface which successfully reduces the specular reflectance by more than 60%.

 Gradient-Index Nanolattices Using Multilayer Processing

We demonstrate for the first time that anisotropic hydrofluoric acid etch behavior beneath certain metal pads (Ti, Au, Pt, Cr) can be controlled to create ultra-sharp 3D silica pyramids due to an interface effect.

Fabrication of silica pyramids by enhanced lateral etching of hydrofluoric acid below metal films

Organic soft materials, such as gels are materials of choice for a vast number of biomedical applications such as tissue engineering, soft robotics, biosensing, drug delivery, implantable electronics, etc. Here we report on in-liquid direct write technique for 3D-sculpturing of hydrogels using focused electron and X-ray beams.

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