United States

Electrostatic lens system optimization is a challenge, especially for systems having many free variables with more than one objective function. An example is minimization of probe size for a primary beam, with in-lens secondary electron detection with maximum detection efficiency. This subject has been investigated here using Multi-Objective GA.

EIPBN 2021

Probe Size and Detection Efficiency Optimization in Electrostatic Lens Systems Using Multi-Objective Genetic Algorithms

soem (second order electrode method)

electron lens design

electrostatic lens systems

genetic algorithms

optimization

The Institute of Physics and IOP Publishing, in partnership with the Chinese Physical Society (CPS) and the University of Science and Technology of China (USTC) are proud to have brought together the international quantum science community online for this inaugural conference.


Early career and leading researchers from universities, industry and government worldwide came together to share, learn and collaborate on the latest research and emerging areas of high interest across quantum science and technology. The broad themes covered by Quantum 2020 included:

Quantum communication;
Quantum computing and quantum simulation;
Quantum sensing, metrology and imaging;
Quantum information theory, software and algorithms;
Quantum foundations;
Quantum technology in industry.
The four-day event featured talks from world-renowned scientists, interactive poster sessions and two exciting panel discussions on the themes of Quantum Technology in Industry and Quantum Technology Programmes Around the World.


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Quantum 2020

The Institute of Physics and IOP Publishing, in partnership with the Chinese Physical Society (CPS) and the University of Science and Technology of China (USTC) are proud to have brought together the international quantum science community online for this inaugural conference.

Early career and leading researchers from universities, industry and government worldwide came together to share, learn and collaborate on the latest research and emerging areas of high interest across quantum science and technology. 

technical paper

The International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication (EIPBN), affectionately known as "3-Beams," is the premier gathering of scientists and engineers who are dedicated to electron, ion and photon lithography, imaging, and analysis; atomically precise fabrication; nanofabrication process technologies and related emerging technologies; and their applications in a broad spectrum of fields. In its 64th meeting, researchers from academia, government laboratories, and industry from around the world meet to present and discuss recent and future trends in these technologies.
 
 
 
[![](https://assets.underline.io/uploads/markdown_image/1/image/4bdf4450aa93073cd684b096b403df2e.png)](https://drive.google.com/file/d/1CPaA3-Yf7_maBxJMUJaUORLF3HGO9CIe/view?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/cea8a407085dee5422a2c16738ce27ca.png)](https://eipbn.org/abstracts/2021/)

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This work explored an accessible and cost-effective way to prepare high quality 2D Bi and derivatives on SiO2/Si substrates by e-beam evaporation. The electrical and thermoelectric properties were characterized. Our study builds a platform to realize high-quality 2D Bi, which may also be suitable in other Xenes.

Tuning Electrical Properties of E-beam Evaporated 2D Bi and Derivatives

In this study, we investigated whether UV-cured resin thin films modified by atomic layer deposition (ALD) could be removed completely by dry etching procedures. UV-nanoimprinted deposition masks were removed completely by sequential physical and chemical dry etching procedures, to demonstrate and area selective deposition of aluminum oxide.

Nanoimprinted Deposition Masks for Area Selective Atomic Layer Deposition of Aluminum Oxide

Long silver rods SERS layer was constructed by using fine grit (1µm) sandpaper as a template for imprinting nano-patterns. Therefore, costly nano lithographic processing was avoided. Raman spectra of R6G were obtained. The signal strength decreased linearly at reduced concentrations in logarithmic scale, as expected for SERS, down to 1nM.

 Low Cost Nano Imprint for Surface Enhanced Raman Scattering

In this work, we apply multilayer etching mask and optimize the etch process to improve etching rate and etching selectivity to pattern sapphire antireflection nanostructures. Initial results show 2-D sapphire nanostructures with 530 nm width and 470 nm height, resulting in two-fold aspect ratio enhancement over previous work.

Plasma Etching of High Aspect ratio Sapphire Antireflection Nanostructures Using Multilayer Etching Mask

Plasmonic biosensors have been attracted growing attentions in recent years because of their unique properties of high sensitivity, label-free operation, and suitable for high-throughput real-time detection. Here, we proposed a facile, use-friendly and cost-effective image-based plasmonic biosensor to detect the concentration of various biomolecule.

Nanotransfer printing of plasmonic nanostructures on convex lens for highly sensitive image-based biosensing

Optical metasurfaces have emerged as potential candidates for next generation optical devices due to their ability to manipulate the amplitude, phase, wavenumber, and polarization of light1. They are two dimensional subwavelength structures which are engineered to abruptly impart a desired property shift to the impinging optical wavefront. Huygens metasurfaces comprise of an array of optical resonators where each resonator acts as a point source causing light to propagate in the forward direction. In our work, these metasurfaces are made using vanadium dioxide, which was chosen as a good candidate because it exhibits a reversible metal-insulator transition above 68oC. Vanadium dioxide is known for its thermochromic property, making it a promising material for smart energy-saving windows2. In this report, we present a bottom-up fabrication process for vanadium dioxide metasurfaces useful for optical modulation at short wave infrared wavelengths (SWIR). Thin films of vanadium dioxide are fabricated using pulsed laser ablation of a vanadium pentoxide target on a quartz substrate. This is done using a KrF excimer laser while flowing oxygen gas into the vacuum chamber during ablation. Electron-sensitive resist (PMMA) is spun on the film and functions as a stencil for patterning using electron beam lithography. Different hard masks have been used to achieve etched features that closely match geometries designed using finite element analysis for specific behaviors. We present results of fabricated nanoantennas using fluorine- and chlorine-based etch processes. We propose that chlorine-based etch recipes are preferred in order to achieve good anisotropy and accurate nanoscale dimensions for optical device applications.

Fabrication of Dynamically Tunable Vanadium Dioxide Huygens Metasurfaces for Optical Modulation

Electrochemical methods have stood out as the most promising since they can detect liquid-phase explosives. Moreover, they are simple, inexpensive, suitable for portable sensors, work at ambient conditions, and have high sensitivity and selectivity for nitro-compound.

Amperometric detection of nitro compounds using novel nanomaterial composite

In this work, a geometric model was developed using line-by-line assembly of non-monodispersed binary nanoparticles to obtain a randomly closed packed assembly structure. To validate the results from the script, a binary nanoparticle assembly was experimentally fabricated. The experimental and simulated FFT peak frequencies were compare.

Modeling Co-Assembly of Binary Non-Monodispersed Nanospheres

This talk will review applications of the Cs+ Low Temperature Ion Source (LoTIS). This ion source enables high precision FIB imaging and machining, and also high-yield secondary ion mass spectrometry (SIMS)

Applications of the Cesium Low Temperature Ion Source

After an introduction to the npSCOPE instrument and its capabilities we will introduce the new STIM detector and present first results obtained with it on single and polycrystalline samples as well biological specimen. The latter will focus on different kinds of nanoparticle samples relevant in the field of nano-toxicology.

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Probe Size and Detection Efficiency Optimization in Electrostatic Lens Systems Using Multi-Objective Genetic Algorithms

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Tuning Electrical Properties of E-beam Evaporated 2D Bi and Derivatives

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