United States

In this paper, we examine the impact of recently introduced low thermal budget HKMG treatments on stress-induced leakage current and defect generation in pMOS devices. We also conduct time-dependent dielectric breakdown measurements to analyze Soft-Breakdown behavior and compare extrapolated lifetimes with conventional high-performance logic devices. Additionally, we explore the effects of a new low-temperature treatment that enhances the quality of the high-k (HK) layer to meet high-temperature  TDDB standards.

IRPS 2024 Main Conference

SILC and TDDB reliability of novel low thermal budget RMG gate stacks

hkmg.

low thermal budget gate stack

dielectric breakdown

silc

3d integration

#### Welcome to the 60th IEEE International Reliability Physics Symposium (IRPS)!

[![](https://assets.underline.io/uploads/markdown_image/1/image/f6b8cf9ecca2209dd3e0fcebe80a2915.png)](https://underline.io/events/282/reception) [![](https://assets.underline.io/uploads/markdown_image/1/image/e787ff477f8d2b687fb0b54d83d35e11.png)](https://drive.google.com/drive/folders/1GAycr7pPrZG2ZzZP-geUL8vGWswjCB1N?usp=sharing) [![](https://assets.underline.io/uploads/markdown_image/1/image/7492fafcc0c623afe96fe15207855ed9.png)](https://www.irps.org/)
 

**General Chair Welcome Message**

Welcome to IRPS 2022! When the IRPS Management Committee began making plans for Dallas, we recognized the strong desire by the reliability physics community to return to a face-to-face symposium that we last had in Monterey in 2019. But as time progressed, we recognized that travel restrictions were not being lifted as rapidly as we anticipated. Rather than leave out those of you who could not attend in person, we adopted a hybrid format allowing for both remote attendance and remote presentations. This is a first for IRPS and I am confident it will be a success for all.

With this new hybrid format, the symposium will return to the original five-day format with Tutorials and Year in Review on the first two days. The Technical Program, Keynote Talks, Workshops and Poster session will be held on the following three days. All of these (except Workshops and Posters) will be available via real-time streaming in the US Central Time zone with virtual attendees having Q&A access to the presenters. For those virtual attendees who cannot watch the live presentations, the material will be available on demand to all attendees for a month after the symposium with the ability to communicate with the authors.

In 2020, we were planning on co-hosting the International ESD Workshop (IEW) ESD workshop when the COVID-19 pandemic hit. For 2022, IEW will be seamlessly embedded into the IRPS Program and will sponsor three tutorials, an invited talk, two technical sessions and two evening workshops focused on ESD and latch-up. And we continue our
collaboration with our sister conference, European Symposium on Reliability of Electron Devices Failure Physics and Analysis (ESREF) by hosting their Best Paper and the International Integrated Reliability Workshop (IIRW) by hosting their Best Student Paper.

Our primary objective is to maintain the symposium’s leadership role in the reliability physics of microelectronic devices by attracting leading researchers to present their work and providing attendees the best place to access this information. With all the buzz in the media about whether Moore’s Law has hit its limit, IRPS has been promoting expertise developed in silicon-based reliability over the past sixty years and expanding into new material areas. This year, eight of the technical sessions are devoted to reliability in topics outside of traditional silicon, including wide bandgap GaN/SiC, emerging memory and neuromorphic computing. I hope our ability to draw these communities together will accelerate the cross-fertilization of ideas. 

The Technical Program consists of four keynote speakers, twenty-three invited speakers and eighty-seven oral presentations organized in thirty technical sessions on eighteen reliability topics. Over two evenings, there will be ten Workshops and sixty-six Poster presentations that are designed to allow in person attendees and experts to interact
with one another. With eighteen tutorials covering topics ranging from fundamental transistor and memory reliability all the way up to automotive and complex system-level reliability, this year’s symposium provides an excellent learning opportunity for engineers and scientists new to reliability as well as experienced individuals wanting to explore new
areas. The Year in Review, which serves as a summary of research in the past year, will cover 3D packaging, emerging memory and aging aware circuit designs.

Finally, I would like to express my extreme gratitude to our patrons and exhibitors, whose support makes IRPS possible.
And to all of you, our in person and virtual attendees, for supporting this symposium for sixty years!

**Charles W. Slayman, General Chair** 
**of 2022 IRPS Management Committee**
 
**About IRPS**

The IEEE International Reliability Physics Symposium (IRPS) is the premiere conference for engineers and scientists to present new and original work in the area of microelectronics reliability. Drawing participants from the United States, Europe, Asia, and all parts of the world, IRPS seeks to understand the reliability of semiconductor devices, integrated circuits, and microelectronic assemblies through an improved understanding of both the physics of failure as well as the application environment. IRPS provides numerous opportunities for attendees to increase their knowledge and understanding of all aspects of microelectronics reliability, and to meet and network with reliability colleagues from around the world.

Please log in to explore this event. You need to log in with the email address you registered with. Access credentials have been sent to your email. 

Please log in to explore this event.

Registration for this conference has now closed. We appreciate your interest and hope to welcome you at a future event. If you’d like to hear about similar upcoming events, please check our website or join our mailing list.

Registration for this conference has now closed.

IRPS 2022 Main Conference 

IRPS provides numerous opportunities for attendees to increase their knowledge and understanding of all aspects of microelectronics reliability. It is also an outstanding chance to meet and network with reliability colleagues from around the world.

technical paper

#### Welcome to the 62nd IEEE International Reliability Physics Symposium (IRPS)! 
**The 2024 IEEE International Reliability Physics Symposium (IRPS) was held in Dallas, Texas from April 14 to 18, 2024.** 

[![](https://assets.underline.io/uploads/markdown_image/1/image/9cc005f94b4ba4a81918eb49e0a51057.png)](https://underline.io/events/446/reception)
[![](https://assets.underline.io/uploads/markdown_image/1/image/acae953ba70ae2a57eed7b0250d6dd7d.png)](https://www.irps.org/)
[![](https://assets.underline.io/uploads/markdown_image/1/image/e1806748f2fc69f825e596872a7afdfd.png)](https://drive.google.com/drive/folders/1SmhpLZD9swYxrfP0TYF6327QTIciy3tV?usp=drive_link)
 

**[IRPS 2024 eGuide](https://drive.google.com/file/d/1DHxkWbafodK_D2HlDi7lwRK7KatgBgBD/view?usp=drive_link)** 
Please save the zip file locally and click the "start.pdf" to view the file. 
 
**IRPS 2024 General Chair Welcome Message**

On behalf of the Management Committee of the IEEE International Reliability Physics Symposium (IRPS) and the IRPS Board of Directors, it gives me great pleasure to extend a warm welcome to all who are planning to attend the IRPS 2024, scheduled to take place from April 14-18, 2024, in Dallas, TX. 
Over its 62-year history, IRPS has solidified its position as the premiere conference for engineers and scientists to present new and original work in the field of microelectronics reliability. Drawing participants from the United States, Europe, Asia, and other parts of the world, IRPS aims to deepen our understanding of reliability of semiconductor devices, integrated circuits, and microelectronic assemblies through an improved understanding of both the physics of failure as well as the application environment. IRPS offers diverse opportunities for attendees to enhance their knowledge and understanding of all aspects of microelectronics reliability. It is also an outstanding chance to meet and network with reliability colleagues from around the world.

The IRPS 2024 technical activities will begin with two days of a total of twenty tutorial sessions covering a broad spectrum of emerging reliability topics beyond CMOS device, circuit and system reliability. These sessions are devoted to both newcomers as well as experts. Three reliability Year in Review (YIR) talks focusing on neuromorphic computing, dielectric breakdown in leading edge devices, and GaN technology will be provided on Monday after the tutorials.

The IRPS 2024 technical program will feature four distinguished keynote talks in the plenary sessions delivered by Prof. Shinichi Takagi from The University of Tokyo and Dr. Su Jin Ahn from Samsung on Tuesday, Dr. Rajeev Malik from IBM on Wednesday, and Dr. Sameer Pendharkar from Texas Instruments on Thursday. The technical program, organized into three parallel tracks, consists of contributed and seventeen invited papers from leaders in industry and academia. Additionally, two invited talks by recipients of paper awards from our sister conferences, European Symposium on Reliability of Electron Device Failure Physics and Analysis (ESREF) 2023 and the International Integrated Reliability Workshop (IIRW) 2023, will be given in the technical program. 

Tuesday evening will host ten workshops, offering an opportunity for in-depth, face-to-face discussions on emerging reliability challenges, including the three IRPS 2024 focus topics. A poster session will be held in the Austin Ranch outside the symposium building on Wednesday evening. Both events are sure to be lively. The IRPS 2024 and the International ESD Workshop (IEW) will be co-hosted with IEW registrants participating in both IRPS and IEW programs.

The IRPS 2024 will adopt a hybrid conference style, allowing virtual access to live oral presentations hosted by the Underline. Real-time streaming of all technical events (excluding Workshops and Posters) will be available in the US Central Timezone, providing virtual attendees with Q&A opportunities. For those virtual attendees who cannot watch the live presentations, the material will be available on demand to all attendees after the symposium. All authors will be presenting in person.

Finally, I would like to extend my extreme gratitude to our patrons, exhibitors, and all participants for their invaluable support, which makes IRPS successful. 

Please enjoy the IRPS 2024!

Koji Eriguchi, General Chair 
of 2024 IRPS Management Committee
 
**About IRPS** 
The IEEE International Reliability Physics Symposium (IRPS) is the premiere conference for engineers and scientists to present new and original work in the area of microelectronics reliability. Drawing participants from the United States, Europe, Asia, and all parts of the world, IRPS seeks to understand the reliability of semiconductor devices, integrated circuits, and microelectronic assemblies through an improved understanding of both the physics of failure as well as the application environment. IRPS provides numerous opportunities for attendees to increase their knowledge and understanding of all aspects of microelectronics reliability, and to meet and network with reliability colleagues from around the world.

You need to log in with the email address you registered with. Access credentials have been sent to your email. 

Please be sure to check your spam and other email folders if you do not see an email confirmation right away.

It looks like you are not registered for this event. 

To access the site please register [**here**](https://www.irps.org/registration-fees). 

Please register!

The IEEE International Reliability Physics Symposium (IRPS) is the premiere conference for engineers and scientists to present new and original work in the area of microelectronics reliability. IRPS seeks to understand the reliability of semiconductor devices, integrated circuits, and microelectronic assemblies through an improved understanding of both the physics of failure as well as the application environment. 

We study oxygen flow role during IGZO PVD process on high temperature PBTI in back-gated TFTs by combining light-assisted with electrical stress measurements. Oxygen flow is observed to affect the magnitude of charge trapping and hydrogen related channel doping during PBTI. We show a correlation between sub-gap DOS and oxygen flow during deposition: the larger the oxygen flow, the smaller the light response at time-zero and its increase during PBTI, despite a larger negative DVth. 

Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI

A full characterization of deep-level-effects in N-polar GaN-based-HEMTs has been carried out by means of Drain-Current-Transient-Spectroscopy (DCTS). The effect of ohmic-contacts, composition of AlGaN-cap-layer, and of the quality of the epitaxial layers have been studied. We show that the occurrence of the “antidispersion”  (ID transient increase during pulsed-measurements), due to negative-shift of threshold-voltage, is related to Fe-related-defects ionization. Through device and epitaxy optimization, dispersion-free devices, showing a 15% transient increase of drain current were obtained.

Deep level effects in N-polar AlGaN/GaN High Electron Mobility Transistors: towards zero dispersion effects

Thermal behavior and its effect on RF large signal aging is extensively studied using Power Amplifier. While strong Iddq increase in linear region is seen, no significant change in RF is observed in compression. RF stress at three different VDD and Tj is reported. Thermal imaging results validate  TA Vs Tj  at Pdiss. Time domain peak voltage swings at different Tj demonstrate that HCIand off-state TDDB are key degradation mechanisms demonstrating excellent thermal behavior.

Thermal considerations on RF reliability and aging in SOI CMOS based Power Amplifiers

The lithium-ion battery experiences catastrophic failure as its health degrades rapidly (knee-point failure). The majority of prior models focus on estimating battery health during its usage phase. This study proposes a cell lifetime degradation model that addresses all three phases of battery life: calendar aging, cycle aging, and post-knee aging.  Experimental data has been used to build individual models for the three stages which have later been combined to form the cell lifetime degradation model. 

Cell Lifetime Degradation Model Development for Li-Ion Coin Cells considering Calendar Aging and Post-Knee Degradation

This paper proposes a virtual FA (vFA), a new methodology that helps identify failures in field using the telemetry data. The telemetry data refers to the information that is generated when DRAM product is deployed in customer’s data center and information is generated and collected when faults occur in the field. Through this, risk can be accurately predicted and improvement activities can be carried out quickly.

Virtual FA methodology for DRAM: Real-time analysis and prediction method using Telemetry, Field data

Cryogenic CMOS circuitry is inevitable to drive and read out qubits for the realization of scalable Quantum Computers (QCs). Analog circuits such as current mirrors and Digital-to-Analog Converter (DAC) are basic building blocks of the control circuits in QCs. In this work, we explore the impact of self-heating (SH) on 5 nm FinFETs and analog circuits for control electronics in QCs using cryogenic-aware BSIM-CMG compact model at both cryogenic and room temperatures.

Impact of Self-Heating in 5 nm FinFETs at Cryogenic Temperatures for Reliable Quantum Computing: Device-Circuit Interaction

In this work, a RTN analysis has been carried out to characterize the defects activated by forward-biased gate stress in GaN-HEMTs with Schottky p-GaN gate. The RTN signal, measured after each stress phase up to time-dependent gate breakdown, revealed four 1/f2 components. Three have been observed on both IG and ID, suggesting defects in the AlGaN barrier, whereas the last one showed up only on IG, possibly related to the Schottky depletion region.

Analysis of RTN Induced by Forward Gate Stress in GaN HEMTs with a Schottky p-GaN Gate

Compared to FinFET, MBCFET has significant structural differences such as nanosheet channel with variable width and dielectric spacer between inner gate and highly doped diffusion region. Nanosheet width and spacer architecture play a crucial role in device performance and enable the design of devices with different advantages and disadvantages. We overview the impact of MBCFET 's unique structures on device characteristics and also analyze the reliability impact of MBCFET's unique structures. 

Device Design and Reliability of GAA MBCFET

PBTI for scaled E-Mode High-K GaN-Transistors with ultra-thin Tox &lt; 21.5Å on 300mm diameter GaN-on-Si wafer is studied for the first time. PBTI-degradation rate is shown to decrease over time to reach saturation. Study indicates prevalence of near-interface-traps generated during stress. A phenomenological model is introduced to describe the saturating BTI-degradation dynamics. Despite PBTI-degradation with DVT saturating at ~350mV, the GaN-MOSHEMT Figure-of-Merit gain is projected to be &gt;~15X better than industry-standard Si LDMOS and pGaN-HEMT/GaN-JFET.

PBTI in Scaled Oxide Submicron Enhancement Mode High-K Gallium Nitride Transistors

We show FeFET-based reservoir computing with notable robustness against charge trapping-induced interface degradation in silicon FeFETs, which is known to be critical when operating as nonvolatile memory devices. This reliability concern is mitigated when employed for reservoir computing, which leverages the dynamic property instead of the static property of FeFETs. A degradation-robust FeFET reservoir can be trained to classify spoken-digit dataset, where gt;10k of write operations were applied during data processing, with high classification accuracy.

Premium content

Downloads

Next from IRPS 2024 Main Conference

Light-assisted investigation of the role of oxygen flow during IGZO deposition on deep subgap states and their evolution under PBTI

Similar lecture

Combining SILC and BD statistics for low-voltage lifetime projection in HK/MG stacks